Abstract

Abstract The growth of chromium carbide coatings by pyrolysis of dicumene chromium in a hot-wall low pressure chemical vapour deposition reactor has been investigated between 300 and 550 °C. Amorphous chromium carbide films were obtained in the low temperature range 300 - 500 °C whereas a textured crystalline Cr 7 C 3 phase was grown above 500 °C. The total carbon content was independent of the deposition temperature and amounted to a carbon excess of about 30% compared with the Cr 7 C 3 stoichiometry. Electron spectroscopy for chemical analysis of both amorphous and crystalline coatings confirms the presence of this carbon excess since about 30% - 40% of free carbon was found. A heterogeneous structural model composed of the Cr 7 C 3 phase and free carbon is proposed both for crystalline and amorphous coatings.

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