Structural characterization and magnetic profile of annealed CoFeB∕MgO multilayers

Abstract

Magnetic tunnel junctions (MTJ) have become of strategic importance due to the large tunneling magnetoresistance ratio (TMR) that they can achieve at room temperature. The largest TMR values observed until now were recorded in MTJs with MgO barriers and CoFeB electrodes after annealing of the junction above the recrystallization temperature of the amorphous CoFeB layers. We have used x-ray reflectivity combined with polarized neutron reflectivity to characterize the structure and the magnetism of [Co60Fe20B20∕MgO]14 multilayers, where the MgO layers were prepared by different methods and annealed at different temperatures. We have found that the MgO preparation method as well as the annealing temperature play a significant role in the systems. A gradient in thickness together with a variation of the scattering length density along the multilayer stacks induce a process of underoxidation or overoxidation, strictly dependent on the MgO production method.