Abstract
BaTiO 3 ferroelectric films were prepared on titanium substrate by microarc oxidation(MAO) technology. The effects of current density and electrolytic concentration on chemical composition, crystal phase, and surface morphologies of the films were characterized by XRD, SEM and EDS. The results show that the films made by MAO technology have a two layer structure with a good combinability between them and with the substrate. The inner layer is composed of Ti oxide without Ba, and the outer layer is mainly composed of BaTiO 3 and Ti oxide. The compactability of the films decreases and the surface roughness of the films increases with the increase of current density and electrolytic concentration. Films with a high content of primitive tetragonal and end-centered orthorhombic BaTiO 3 are obtained in 0.2 mol/L Ba(OH) 2 solution with current density of 5 A/cm 2 after 18 min.
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