Abstract
Abstract The effect of impurity atoms in the defect structures of a diamond film has been studied by electron spin resonance (ESR). It has been observed that introducing boron atoms into the diamond film during chemical vapor deposition (CVD) reduces paramagnetic defects (Pdia and Pac centers) by decreasing the activation barrier, which leads to a disappearance of the defects. On the other hand, the nitrogen doping introduces both defects and donor electrons in the diamond films.
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