Abstract
The family of two–dimensional (2D) materials is an attractive subject for modern microscopy techniques such as helium and neon ion microscopy. In this chapter, we provide a theoretical treatment on the effects of light ion irradiation on the structure of 2D materials, foremost graphene, using methods from the binary collision model to molecular dynamics. While reviewing the current literature on the topic, we point out that helium and neon irradiation can be used to create specifically small point defects (single and double vacancies) or to drill features into graphene. We also point out the current lack of studies involving non-graphene 2D materials.
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