Abstract
In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed of two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model is considered along with the nonlinear electric actuating force to get the equation of motion governing the structural behavior of the actuator. A reduced-order modeling (ROM) based on the Galerkin expansion technique, while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions, is assumed as a discretization technique of the equations of motion in this investigation. The results showed that the double-microbeam MEMS actuator configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.
Highlights
Since the 1980s, when micro-electro-mechanical-systems (MEMS) were initially commercialized, the demands for these tiny devices have increased dramatically
It is clear that assuming a double-microbeam, or even multi-layers configuration, may increase the deflection of the microbeam with the same voltage that is provided in a single microbeam. It might help reducing the power consumption and the switching time for these types of applications where large deformation is needed with minor power consumption as well lower switching time. It is clear from the afore-summarized literature review that it is important to study the structural behavior of electrically coupled double-microbeams MEMS actuator
To be able to compare both actuator configurations, we will consider both models for a single-microbeam MEMS based actuator configuration and a double-microbeam configuration are shown in Figure 1a,b, respectively
Summary
Since the 1980s, when micro-electro-mechanical-systems (MEMS) were initially commercialized, the demands for these tiny devices have increased dramatically. It is clear that assuming a double-microbeam, or even multi-layers configuration, may increase the deflection of the microbeam with the same voltage that is provided in a single microbeam As a result, it might help reducing the power consumption and the switching time for these types of applications where large deformation is needed with minor power consumption as well lower switching time. It might help reducing the power consumption and the switching time for these types of applications where large deformation is needed with minor power consumption as well lower switching time It is clear from the afore-summarized literature review that it is important to study the structural behavior of electrically coupled double-microbeams MEMS actuator. The eigenvalue problem will be solved to variation of the natural frequencies and the mode shapes of the system will be discussed
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