Abstract
We have studied structural and phase transformations in the surface layer of compact titanium nitride-based ceramics during high-temperature annealing in vacuum, nitrogen, and air. The formation of an oxide phase during heat treatment of TiNx ceramics in air is controlled by bulk oxygen diffusion from the gas phase across an initially forming dense rutile TiO2 layer. Annealing in vacuum or nitrogen in the range 400–800°C changes neither the phase composition nor the grain structure of the ceramics.
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