Abstract
The influence of substrate temperature and nozzle-to-substrate distance (NSD) on the structural, morphological, optical and electrical properties of Sb:SnO2 thin films prepared by chemical spray pyrolysis has been analyzed. The structural, morphological, optical and electrical properties were characterized by using XRD, SEM, UV-visible spectrophotometry and Hall effect measurement techniques. It was seen that the films are polycrystalline, having a tetragonal crystal structure with strong orientation along the (200) reflection. The pyramidal crystallites formed due to coalescence were observed from SEM images. The values of highest conductivity, optical transmittance and figure of merit of about 1449(Ω·cm)−1, 70 %and 5.2 × 10−3 □/Ω, respectively, were observed for a typical film deposited using optimal conditions (substrate temperature = 500 °C and NSD = 30 cm).
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