Abstract
F-doped SnO2 (SnOx:F) films deposited on a glass substrate by atmospheric pressure chemical vapor deposition (APCVD) were annealed at 600°C for different times. The effects of annealing time on the structural, optical and photoluminescence (PL) properties of SnOx:F films were investigated. The results show that all the films have a polycrystalline cassiterite tetragonal crystal structure and exhibit obviously preferred orientations with (200) and (310) planes. The films annealed for 15min possess the smallest particle sizes, of 94.95nm, and a minimum root mean square roughness of 15.74nm. The transmittances of all the films in the visible range can reach ∼80%. When the annealing time increases from 0 to 60min, the optical band gap of SnOx:F films decreases from 3.91 to 3.87eV. The room temperature PL spectra show weak UV emission, intense violet emission and broad and weak blue emission. The violet emission related to F substitutions and oxygen vacancies is composed of three PL subbands centered at 3.22, 3.03 and 2.81eV. The photoemission position is observed to be independent of annealing time.
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