Structural and Morphological Study of W−Sn−O Thin Films Deposited by Rheotaxial Growth and Thermal Oxidation

Abstract

In the present paper we analyzed W-Sn-O thin films deposited by the rheotaxial growth and thermal oxidation technique and annealed at different temperatures. The aim of this work is to obtain stable gas sensor materials and to increase the surface-to-volume ratio in the active phase, thus improving the gas sensor sensibility. The structural characterization was performed by means of X-ray diffraction, glancing incidence X-ray diffraction, and X-ray microdiffraction techniques. The morphological characterization was obtained by means of scanning electron microscopy.