Structural and mechanical properties of amorphous AlMgB14 thin films deposited by DC magnetron sputtering on Si, Al2O3 and MgO substrates

Mohammad Noroozi,Andrejs Petruhins,Grzegorz Greczynski,Johanna Rosen,Per Eklund

doi:10.1007/s00339-020-3316-z

Mohammad Noroozi, Andrejs Petruhins + Show 3 more

Open Access

https://doi.org/10.1007/s00339-020-3316-z

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Abstract

AlMgB14 coatings have been deposited by DC magnetron sputtering from elemental targets on Si (001), Al2O3 (0001) and MgO (001) substrates at temperatures in the range of 25–350 °C. The structural and mechanical properties of AlMgB14 films were characterized by X-ray diffraction, scanning electron microscopy, nanoindentation, and analyzed as a function of deposition conditions and substrate materials. The results show that all films are X-ray amorphous, and the mechanical properties of the deposited films depend on the substrate and growth temperature. AlMgB14 thin films deposited at 350 °C are found to have smoother surfaces and containing more well-formed B12 icosahedra than the films deposited at lower temperature, which consequently increase the hardness of the deposited films. The maximum hardness and Young’s modulus of the as-deposited films are about 32.3 GPa and 310 GPa, respectively, for films deposited on Al2O3 substrate at 350 °C.

Highlights

IntroductionThe crystal structures of many highboron-content compounds contain B12 icosahedra based on 12-atom clusters in which atoms occupy the 12 vertices of an icosahedron [1]
Boron-rich solids are materials with boron as their primary atomic component
The elemental composition of A lMgB14 thin films was characterized by X-ray photoelectron spectroscopy (XPS)

Summary

Introduction

The crystal structures of many highboron-content compounds contain B12 icosahedra based on 12-atom clusters in which atoms occupy the 12 vertices of an icosahedron [1]. These dense B networks with unusual bonding generates interesting mechanical and transport properties. The ternary boride A lMgB14 is one of the promising boron-rich boride materials that can form icosahedral structures and has been investigated intensively during last years. This material is attractive due to high

Present Address

Materials and methods

Results and discussion

Conclusions