Abstract
Aluminium doped zinc oxide (AZO) thin films were prepared on glass substrates by spray pyrolysis technique. The Al concentration in the starting solution was varied from (0 to 5) wt %. XRD revealed that both pure and AZO thin films were polycrystalline with hexagonal structure and exhibited (002) preferential orientation. AZO film with minimum electrical resistivity 8.61×10 ³⁻ Ω.cm were obtained at a doping ratio of 2 wt. %.
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