Abstract

The results of investigation of structural and electrical properties of bulk SiC crystals, which were grown by physical vapor transport method with di erent Ce impurity content added to the SiC source material, are presented. The gradual dosage of cerium from the SiC source and continuous presence of the cerium vapor over the SiC crystallization fronts during the crystal growth processes are con rmed. The cerium in uences the overall concentration of structural defects. The increase of the concentration of both, donors and acceptors, and appearance of new shallow donors (15 32 meV) in 4H-SiC crystals are observed.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call