Abstract
The structure of SiO2 gel-films prepared from acid and basic TEOS solutions is analyzed by high energy transmission electron diffraction method. The Si-O bond length of gel-films is 1.58 to 1.60 A, which is shorter than that of vitreous silica (1.61 A) but similar to that of 80 A thick evaporated a-SiO2 film. An atomic pair peak with 0.81 A distance exists on the reduced radial distribution functions of the gel-films, which is believed to be O-H, but being smaller than that of H2O (0.969 A).
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