Strongly tunable nonlinear MEMS resonators by electro-thermoelastic buckling

Abstract

This talk presents the benefit of buckling in strongly tuning nonlinear MEMS resonators. In particular, the talk shows experimental buckling achieving more than 230% tuning in the natural frequency of drumhead MEMS resonators. Moreover, the experiments demonstrate that buckling switches the frequency response between purely stiffening, purely softening, and stiffening-to-softening nonlinearities. We tune the buckling state in these experiments by controlling the electric voltage and the temperature of the resonators. Therefore, these resonators undergo electrostatically-mediated thermoelastic buckling where specific combinations of temperature and voltage are required to access the distinct vibrational responses. We explain the observed linear and nonlinear responses by a reduced-order model (ROM) that lumps the resonator into a 1-degree-of-freedom mass connected to springs reflecting bending, stretching, electrostatic forces, thermal expansions, and residual stresses. The ROM mimics von Mises trusses to model the buckling in the membrane resonators without the need for exact geometry or structure to model the resonators. This developed ROM and the electro-thermoelastic buckling tunability present useful applications for on-chip acoustic devices in different fields such as signal manipulation, filtering, and MEMS waveguides.