Abstract
We have grown epitaxial thin films of Co 3O 4 on single-crystal MgO at ∼400°C by low-pressure thermal metalorganic chemical vapor deposition using cobalt(II) acetylacetonate as the precursor. X-ray phi-scan analysis shows that cube-on-cube epitaxy of Co 3O 4 occurs on MgO(1 0 0) in the temperature range ∼400–550°C. Films grown on MgO(1 0 0) at 410°C show a rocking curve FWHM of only 0.44°, despite a rather large lattice mismatch of 4.1%. This is interpreted to be due to the excellent match between the oxygen sublattices of Co 3O 4(1 0 0) and MgO(1 0 0). The strong epitaxy which occurs, leads to a low activation energy ( E a) for growth on MgO. Scanning electron microscopy analysis shows faceted grains characteristic of the cubic symmetry of Co 3O 4, the faceting being stronger at higher growth temperatures.
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