Abstract
Freestanding hexagonal two-dimensional photonic crystal (PhC) microcavities with Ge self-assembled quantum dots were fabricated on silicon-on-insulator substrates. Strong photoluminescence associated with Ge quantum dots was observed in the wavelength region of 1.2–1.6μm at room temperature. Sharp peaks dominated the spectrum, showing strong optical resonance inside the cavity. A resonant peak with a quality factor of 560 was observed at 1.58μm along with a significant enhancement of the luminescence in the microphotoluminescence spectrum. The peaks were also observed to reasonably shift when the structural parameter of PhC was changed.
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