Abstract

A photoluminescence study has been made on an oxygen-containing Si fine structure fabricated by a gas evaporation technique. Transmission electron micrographs have shown that the fine structure is composed of nonspherical particles aggregated together in chain-like or cluster-like structures. The luminescence from the samples after oxidation treatment is bright blue as viewed with the naked eye, the spectra having a peak at about 470 nm or shorter wavelength. A peculiar temperature dependence of the emission peak indicates that the emission is strongly correlated with some structural change in the fine structure.

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