Abstract
Many applications based on TiO 2 thin films are strongly influenced by the film crystalline quality, microstructure and surface morphology. We have utilized x-ray scattering methods for crystal structure study of TiO 2 films, grown by DC reactive magnetron sputtering without heating. We have observed the formation of ordered phases after post-deposition ex-situ annealing in air at 600 °C. The distinct biaxial texture with respect to the c-plane (0001) Al 2O 3 substrate surface, which developed during heating, shows remarkable patterns in pole figures. We have identified epitaxial relationships of anatase A(001)[110]‖sub(001)[11̄00] and rutile R(100)[001]‖sub(0001)[100] within single TiO 2 layer. In addition, within the same sample, we have observed the anatase in (112) orientation with two in-plane relationship options A(112)[11̄0]‖sub(0001)[21̄1̄0] and A(112)[11̄0]‖sub(0001)[11̄00].
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