Abstract
Microfabricated silicon microcantilevers coated with gold on one side have been used as working electrode in a three-electrode electrochemical arrangement. In addition to electrochemical current, cantilever bending has been used as a signal for monitoring electrode reactions on the cantilever surface. The microcantilever bending was measured by an optical beam deflection method as the surface potential was scanned and electrochemical reactions occurred on the surface. The microcantilever bending due to differential surface stress was used to sense Pb and Cu using cyclic voltammetry (CV) and linear sweep stripping voltammetry (LSSV).
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