Stress/strain distribution around implantation boundaries

Abstract

Abstract Dynamical X-ray diffraction theory in elastically distorted crystals is used to simulate the rocking curves of ion-implanted ferrimagnetic garnet epilayers. It is found that excellent agreement between experimental and simulated rocking curves may be obtained in the case of a standard neon implantation. On the other hand, despite numerous attempts, only a poor fit has been achieved in the case of hydrogen implantation. Peak and sub-peaks broadening suggests that Huang scattering takes place, at least at a precursor level. Finally, the (plastic) strain profiles deduced from the rocking-curve analysis provide a means of computing the elastic strains associated with implantation boundaries, according to the model developed in the first part of this work. Satisfactory agreement between theory and the experimental determination of these strains is obtained by means of plane-wave X-ray imaging.