Abstract
A special mechanism of stress relaxation in nanocrystalline films is suggestedand theoretically described. The mechanism represents the interfacial slidingaccompanied by the formation of wedge disclination dipoles at grain boundaries innanocrystalline films. The wedge disclination dipoles release, in part, mismatchstresses generated at film–substrate boundaries. It is theoretically shown that thespecial relaxation mechanism is energetically favorable in various nanocrystallinefilms deposited onto single crystalline substrates (in particular, AlN/6H-SiC,GaN/6H-SiC, 3C-SiC/Si and Ni/Cu film/substrate systems) in wide ranges of theirparameters.
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