Stress relaxation effects in Ag/Pd superlattices at initial stages of ion beam mixing

Abstract

Initial stages of the ion beam mixing process in Ag/Pd multilayers are analyzed using X-ray diffraction. The interface spread caused by ion irradiation is reflected in changes in the relative intensities of satellite superlattice peaks. Diffraction profiles measured after ion irradiation are interpreted using computer programs based on a Monte Carlo simulation. The thickness of mixed interface regions and interplanar distances of both components of multilayer are determined for each stage of ion irradiation. The determined mixing parameter is independent of the multilayer period and of the relative concentrations of components. A stress relaxation effect is observed for low ion doses.