Abstract

ABSTRACTIn this paper, we have studied the relationship between medium-range order structures in and stress relaxation in amorphous diamond-like carbon films with fluctuation microscopy. Our preliminary results show strong correlation between stress relaxation and medium-range order. Our previous results showed that annealing films that had been through stress relaxation procedures caused great increase of medium-ranger order. In this paper, we have found that the increase of medium-range order in films that have been annealed before going through stress relaxation through removal of substrates is less pronounced than that of films that have been annealed after removal of substrates. We will discuss interpretations and implications of these results.

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