Stress-Frequency Character of AT-Cut Thin Circular Multi-Electrode Quartz Resonators

Abstract

Stress distribution of the thin circular quartz crystal has been analyzed by ANSYS finite element simulation when subjected to radial force. A quartz crystal resonator with same base and different electrode is designed. When putting on the radial force, we research the force sensitive nature of this resonator and its relationship with the force azimuth. The results show that, It is closely to the resonator structure and the force position, that the force sensitive character of quartz resonator with same crystal and different position. Selecting the appropriate force position, we can receive greater diversity of force sensitivity. The output using difference frequency between the different resonators can suppress interference factors. Making the difference frequency signal as a superposition of complex processing can enhance this resonator overall force sensitive. With the difference frequency and signaling complex, the force-frequency conversion coefficient of this resonator is up to 500Hz / N.