Abstract
Each complicated coating, in particular, a dispersive mirror consists of dozens of layers. Thin films layers have mechanical stresses. After summing up stresses from all layers, the resulting stress is high enough to bend even a relatively thick substrate. To avoid this effect we suggest depositing an antireflection coating (AR) at the back-side of the substrate which together with suppression of unwanted reflections from the back side will also compensate this stress. We demonstrate unique, extremely thick and sophisticated AR coating consisting of 71 layers with the total physical thickness of 7.5 µm. This AR coating completely compensates stress from the dispersive mirror coated on the front side and minimizes unwanted reflections.
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