Abstract
The mechanical properties of porous silicon (PS) microstructures on crystalline silicon (c-Si) were investigated. Micro-Raman spectroscopy was applied to probe stresses in PS micro-hotplates in the form of cantilevers. Important information was obtained for the stress distribution across cantilevers supported at one edge. The structural stability of thermally treated PS after long time exposure in air was also investigated. The results can be used for optimization of microsensors based on the PS microstructures.
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