Abstract
A ZnO-based film bulk acoustic resonator has been fabricated using a magnetron sputtering technology, which was employed as a biosensor for detection of mucin 1. The resonant frequency of the thin-film bulk acoustic resonator was located near at 1503.3 MHz. The average electromechanical coupling factor {K}_{mathrm{eff}}^2 and quality factor Q were 2.39 % and 224, respectively. Using the specific binding system of avidin-biotin, the streptavidin was self-assembled on the top gold electrode as the sensitive layer to indirectly test the MUC1 molecules. The resonant frequency of the biosensor decreases in response to the mass loading in range of 20–500 nM. The sensor modified with the streptavidin exhibits a high sensitivity of 4642.6 Hz/nM and a good selectivity.Electronic supplementary materialThe online version of this article (doi:10.1186/s11671-016-1612-5) contains supplementary material, which is available to authorized users.
Highlights
The piezoelectric biosensor has developed to a new type of biosensors, via the main electro-acoustic conversion devices, which can monitor the acoustic output signal of the transducer to reflect the physical and chemical changes of the measured substance [1–3]
PBO barrier layer has been prepared with a height of several hundred micrometers surrounding the active area for precisely manual dispensing
The results indicate film bulk acoustic resonator (FBAR) using streptavidin as sensitive lays has good selectivity to detect MUC1, shown the strong specific binding in biotin-avidin system and the application prospect
Summary
The piezoelectric biosensor has developed to a new type of biosensors, via the main electro-acoustic conversion devices, which can monitor the acoustic output signal of the transducer to reflect the physical and chemical changes of the measured substance [1–3]. Three main types of electroacoustic transducer are quartz crystal microbalance (QCM), surface acoustic wave sensor (SAW), and thin-film bulk acoustic resonator (FBAR). FBAR has the obvious merits such as high resonant frequency, small in size, high sensitivity, and compatibility with IC technology [4–8]. Many work based on FBAR biosensor have been carried out and become the research hotspots in the fields of medical, food security, environment monitoring, etc. Mastromatteo et al reported a highly sensitive mass sensor based on AlN/Si FBAR for artificial olfactory and bio-sensing application [13].
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