Stratified suspension of highly ordered Si nanoparticles in SiO2 created by Si MBE with oxygen co-implantation

Abstract

Abstract A new class of non-dispersive Si nanoparticle (SNP) system has been created on Si(1 0 0) wafers by low-energy oxygen co-implantation during Si MBE. Ordered, highly oriented Si nanoparticles embedded in SiO2 with dimensions d = 4–100 nm are observed. Transmission electron microscopy shows that SNPs are oriented preferentially to [1 0 0], indicative of epitaxial growth of SNP as compared to conventional dispersive SNPs. Individual SNP is confirmed to be a single crystal and exhibits unusual habits with (1 0 0) and (1 1 1) facets. Broad visible luminescence bands are observed at room temperature.