Strategy for a flexible and noncontact measuring process for freeforms

Abstract

The cylindrical coordinate measuring machine MarForm MFU200 can measure not only rotationally symmetric aspheric samples but also nonrotationally symmetric freeform surfaces. Applying both an optical and a tactile probe system, the measuring processes of the optical freeform surface and fiducials can be combined in a very flexible way. A strategy to measure freeforms including the determination of reference coordinate systems, the measuring process, and the analysis are discussed. In this process, fiducials defining a reference coordinate system are of fundamental importance. It is shown how different positions of fiducials can be measured.