Abstract
This article presents a computational approach for comparing various broadband monitoring strategies, taking into account the positive and negative effects associated with the correlation of thickness errors caused by the monitoring procedure. The approach is based on statistical estimates of the strength of the error self-compensation effect and the expected level of thickness errors. Its application is demonstrated by using a 50-layer, nonpolarizing edge filter. The presented approach is general and can be applied to verify the prospects of broadband monitoring for the production of various types of optical coatings.
Highlights
Optical monitoring techniques can be applied in the production of optical coatings in almost all deposition plants
When considering optical monitoring strategies, we should take into account the correlation of thickness errors by optical monitoring procedures
It can lead to the development of a strong cumulative effect of thickness error growth, but on the other hand, it can result in the self-compensation of thickness errors
Summary
Optical monitoring techniques can be applied in the production of optical coatings in almost all deposition plants. Both commercial and homemade optical monitoring devices are widely used all over the world, and choosing a good optical monitoring strategy is a key issue for the production of high-quality optical coatings. There is a great variety of optical monitoring techniques, and they are divided into monochromatic and broadband techniques [1]. In the case of monochromatic techniques, the question of having a proper monitoring strategy was raised many decades ago. The production of very complicated optical filters became possible due to the presence of a very strong error self-compensation effect associated with this type of monitoring
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