Abstract
The strain sensitivity, i.e. the resistivity change due to mechanical strain of thin composite nano-cermet films of Pt–SiO2 was investigated. We prepared films with a thickness of 400nm by means of co-sputtering processes at substrate temperatures around 400°C. The specimens respond to uniform strain (ɛ=0.2‰) with gauge factors up to 18. These gauge factors remained high at least up to 250°C in air and also after further annealing up to 600°C in vacuum. Therefore we state these functional films might be suitable for high temperature pressure and force sensors. The films have a relatively high film resistivity of some MΩ/sq and exhibit temperature coefficients of resistance (TCR) in the range of −2000ppm/K up to −600ppm/K. X-ray diffraction revealed a single crystalline fcc platinum phase while transmission electron microscopy proved a typical granular structure of the films. Pt-clusters sized 5–10nm are embedded in an amorphous insulating matrix of silica. The composition of such nano-cermet films displaying high gauge factors is approx. 40at% Pt, 20at% Si and 40at% of O.
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