Abstract
A method has been developed to measure strain in ultra-thin (<50 Å) buried films. The presence of the film leads to a step in the yield of the host crystal in a channeled RBS spectrum for off-normal crystal axes. The size of this step depends on the flux distributions in the channel, which in turn depend on the angle ψ between the incoming beam and the crystal axis. Two maxima in the step size appear as a function of the angle ψ. Monte Carlo (MC) simulations have been used to interpret the experiments.
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