Abstract

We prepared a stacked structure consisting of a quasi-free-standing functional oxide thin film and a ceramic piezoelectric disk and observed the effect of the piezoelectric disk deformation on the resistance of the thin film. Epitaxial V2O3 films were grown by a pulsed laser deposition method on muscovite mica substrates, peeled off using Scotch tapes, and transferred onto piezoelectric elements. In this V2O3/insulator/top electrode/piezoelectronic disk/bottom electrode structure, the resistance of the V2O3 film displayed a variation of 60% by sweeping the piezoelectronic disk bias. With support from x-ray diffraction measurements under an electric field, a huge gauge factor of 3 × 103 in the V2O3 film was inferred. The sizeable resistance change in the V2O3 layer is ascribed to the piezo-actuated evolution of c/a ratios, which drives the material towards an insulating phase. A memory effect on the resistance, related to the hysteretic displacement of the piezoelectric material, is also presented.

Highlights

  • Among the various materials whose physical properties are strain dependent, vanadium sesquioxide (V2O3) has been of great interest for half a century because of its rich temperaturepressure phase diagram

  • It is known that the c/a ratio of V2O3 jumps at the transition, i.e., c/a is high (>2.815) in the paramagnetic metal (PM) phase, while it is low (

  • X-ray diffraction (XRD) analysis of the obtained V2O3 films on the mica substrates revealed that the films were out-of-plane oriented along its c-axis [Fig. 2(a)] and in-plane oriented in sixfold symmetry [Fig. 2(b)], suggesting the epitaxial growth of the films

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Summary

INTRODUCTION

Among the various materials whose physical properties are strain dependent, vanadium sesquioxide (V2O3) has been of great interest for half a century because of its rich temperaturepressure phase diagram. We prepared a series of V2O3 films on sapphire substrates with various deposition conditions, resulting in a wide range of c/a ratios Their physical properties, such as the PM–AFI phase transition temperature and resistivity ratio between high and low temperatures, were revealed to be clearly dependent on the c/a ratio at RT.. We have used a conductive atomic force microscopy (C-AFM) system to apply a local pressure of subgigapascal to a c axis-oriented V2O3 film and achieved obvious metal–insulator transition.. The structure consists of a quasi-free-standing V2O3 film fixed on an M–I–M-structured piezoelectronic element, with neither a rigid frame nor an AFM tip Such a design was inspired by a number of previous studies on strain-induced modification of magnetic properties of thin films placed on piezoelectric bases.. We observed a sizeable variation of RV2O3 that can only be explained by the resistivity change due to the piezo-induced modification of its c/a

Films deposition process and crystallographic characterization
Electrical and mechanical properties measurement
RESULTS AND DISCUSSION
CONCLUSIONS
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