Abstract

Room-temperature spectroscopic ellipsometry measurements were carried out on ZnSe thin films grown on (001)GaAs substrates by molecular-beam epitaxy for the study of the lattice mismatch-induced strain at the interface. The magnitude of the absorption coefficient at the E0+Δ0 critical point is very sensitive to the strain in the film. The variation in the magnitude of the absorption coefficient is used to estimate the critical thickness for the onset of dislocation generation. Almost complete relaxation of the films was obtained for thicknesses higher than 500 nm. Also, the strain-induced coupling between the valence subbands was found to cause additional shifting of the light-hole subband.

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