Abstract
Abstract A numerical method is proposed for solving the kinetic Boltzmann equation for moving ions in solid targets, which are produced by fast charged particles. The developed method makes it possible to find the spatial distribution functions for stopped implanted charged particles and the radiation damage produced by them. We present the results of calculations of the implantation depth profiles for stopped ions and of the radiation damage induced by them for a nickel target irradiated with alpha particles of E = 50, 100 and 200 keV. The results of the calculation obtained using the present method and other procedures are also compared.
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