Abstract
Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 0.03–1MeV/u 12C, 16O, 35Cl, 79Br and 127I ions have been measured by the transmission technique employing a Time of Flight-Elastic Recoil Detection Analysis (ToF-ERDA) setup. Simulation of experimental slowing down energy spectra was employed to obtain stopping cross section curves over a continuous energy range. The experimental results are compared with the predictions of the SRIM2012 parameterization and literature data.
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