Abstract
Elemental stopping cross sections, ϵ, can be determined by Rutherford backscattering either with thin-film or bulk targets. Both methods rely on approximations, which are met well for heavy elements. We present a modification of thin-film method which eliminates the need for approximations, but at the cost of precision. Results obtained for both light and heavy elements agree with those obtained by traditional methods. For Al, ϵ values are obtained which deviate from most published results, but agree with previously unexplained AlSi and AlAl 2O 3 yield ratios.
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