Abstract

In this short paper we present a stochastic projection based Monte Carlo algorithm for solving a nonlinear ill-posed inverse problem of recovering the phase of a complex-valued function provided its absolute value is known, under some additional information. The method is developed here for retrieving the step structure of the epitaxial films from the X-ray diffraction analysis. We suggest to extract some additional information from the measurements which makes the problem well-posed, and with this information, the method suggested works well even for noisy measurements. Results of simulations for a layer structure recovering problem with 26 sublayers are presented.

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