Abstract
The initial stage of epitaxial growth of cubic β-SiC on vicinal Si(111) misoriented towards the [112̄] direction is studied by scanning tunneling microscopy in ultra-high vacuum. The clean Si(111) surface contains terraces separated by groups of atomic steps. The separation between the atomic steps within a group is observed to be approximately equal to the length of the long axis of the Si(111)7 × 7 unit cell. We postulate that the SiC forms three-sided pyramids with surfaces of (110) orientation. The pyramids are located mostly at the step edges and are sharper than the end of the tip. This results in a series of identically shaped tip images located at the step edges, which display the structure of the tip.
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