Abstract

In this work, we developed a novel anti-stiction structure with rounded cross section which dramatically prevented stiction by reducing the Laplace pressure force and contact areas effectively. Also structure with rounded cross-section was more effective in reducing stiction because of the increased rigidity. We demonstrated a 6/spl mu/m-suspended 1/spl mu/m-thick metal cantilever with 60/spl mu/m in width and 1,000/spl mu/m in length successfully released in the conventional wet releasing process for the beam with rounded cross-section, while the length was limited to 125/spl mu/m for the beam with rectangular cross-section.

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