Stereological stereometry: Simplified approaches to volumetry by SEM

Abstract

AbstractNew approximate methods for the measurement of volumes of pits in otherwise flat substrates are outlined: all are based on taking parallax measurements from SEM stereo‐pair images. The measured points lie at pre‐set intervals in a grid, the grid corresponding to the usual 2‐D array used in stereology and being used for the same purpose – that of determining area. Depth below the original surface is derived from the parallax at each point. Several practical alternatives for parallax measurement are considered, all involving relatively inexpensive instruments. The cheapest – and it remains to be determined whether also the most efficient – involves the use of a stereo‐pair grid overlay, called a “2D‐3D” grid. This grid exists physically in only two dimensions, but is seen to exist apparently in three dimensions.