Abstract
Growth of GaAs by repeated deposition of single atomic layers using the switched laser metalorganic vapor phase epitaxy technique is reported. Suspension of Ga deposition at 100% coverage is an essential part of the growth mechanism for stepwise epitaxy—the ideal atomic layer epitaxy. This is achieved by suppressing pyrolytic decomposition and favoring photocatalytic decomposition of trimethylgallium (TMG). A growth model for stepwise monolayer epitaxy is proposed which suggests that photocatalytic decomposition of TMG occurs only at surface As atoms and not at Ga atoms.
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