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Abstract
A stepping drive method that does not use an extra clock signal source for a self-oscillation-type ultrasonic motor is described. The motor used here is an in-phase drive-type ultrasonic motor using two degenerate bending vibration modes of a disk. The output electrical signals caused on a self-oscillation are used as a clock signal for the stepping drive. An angular displacement at every step is realized using an open-loop control system without a rotary encoder as an angular displacement sensor. In order to eliminate the deviation of angular displacement at every step, a multitooth rotor was used. As a result, stable stepping drive of an ultrasonic motor was realized.
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