Abstract
The STEM is a technique used in failure analysis that solves the gap between conventional Scanning Electron Microscope (SEM) and Transmission Electron Microscope (TEM) and enables the acquisition of high resolution images of a sample mounted on a TEM grid. This paper explains the theory of STEM imaging and presents its application through some failure analysis works preformed with a FEI Strata Dual Beam 235 mounted with a STEM detector and an EDAX Energy dispersive X-ray detector. This technique is essentially used for failure root cause research and is particularly interesting when combined with elemental analysis, as it gives high resolution results when performed on thin samples.
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