Abstract
Stable plasma production in a radio-frequency plasma source and steady-state high-neutral-pressure environment in a test region has been achieved simultaneously with backflow suppression components such as orifices and a differential pumping system. Neutral pressure in the test region is changed by two orders, resulting in changes in the electron temperature and density in the test region. Conversely, neutral pressure, electron temperature, and electron density near a plasma production region showed little change. The result indicates that the experimental device provides us independent control knobs of source plasma and neutral pressure in the test region.
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