Status of X-ray Acoustooptics at the Institute of Microelectronics Technology Russian Academy of Sciences

Abstract

The electrical measurement method, scanning electron microscopy method and high-resolution X-ray diffraction method have been used to investigate the process of the surface acoustic wave (SAW) propagation in a LiNbO3 ferroelectric crystal. Measurement of the amplitude-frequency response provides information on the losses in the acoustoelectronic device during the process of the SAW propagation. The scanning electron microscopy method permits to visualize the SAW on the surface of piezoelectric crystals in the real-time mode and to observe diffraction phenomena in acoustic beam. The X-ray diffraction method is sensitive to the crystal lattice distortions by surface acoustic wave and allows determining the SAW amplitudes.