Abstract
The optical line spectra of multi-charged gaseous and metal ion beams from ECR plasma have been observed using a grating monochromator with photomultiplier. This new method simplifies the observation of the targeted ion species in the plasma during beam tuning. In this paper we describe present condition of the Hyper-ECR ion source tuning with this plasma spectroscopy method. This data is important because separation of ion species of the same charge to mass ratio with an electromagnetic mass analyzer is almost impossible.
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