Abstract
This paper reports a new proof-of-concept gas sensor based on statistical behavior of multiple gas molecules. The reported gas sensor, consisting of a tiny gap, provides on/off switching behavior as it captures the target gas molecules. The key innovation lies in the fact that such an off/off switching becomes statistically-reliable when multiple gaps and molecules are utilized. Such a statistics-based gas sensor was demonstrated by fabricating multiple nano-gap arrays, coating the gaps with specific chemistry linkers, and monitoring the reliability of the performance as well as other variables. The fabricated sensors in $1\mathrm{x}1, 5\mathrm{x}5$ and $9\mathrm{x}9$ arrays showed statistics-based trends of (1) increasing decisiveness (sharper on/off slopes vs. concentrations), (2) decreasing failures (increasing repeatability) and (3) lower off-switching speed. The fabricated sensors also resulted in (4) ultra-low power of $ due to normally-off operation.
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