Abstract
A model on the statistics of ion-induced kinetic electron emission is presented. The model is primarily designed to describe light-ion bombardment at energies not too far above the threshold for kinetic-electron emission. We use an invariant-embedding approach, which includes angular scattering and stopping of the ion, electron excitation, and elastic and inelastic scattering. A particularly simple picture evolves when the ion travels on a straight line in the vicinity of the surface: Then the emission statistics is simply a sum of two Poisson distributions, where the ion reflection coefficient determines the weight of the Poisson terms. Comparison to experiment is favorable. Extensions with respect to ion trajectory, energy dependence, and recoil contribution are discussed.
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